ViennaPS-4.1.1

What's Changed

New

• Flux engines now support triangle-based geometries in 2D, enabling more consistent behavior between 2D and 3D simulations.

Improvements and Fixes

• Updated ion model utilities and ray-tracing utilities.
• Fixed an issue where consecutive calls to Process.apply() could crash.
• Improved installation script for smoother dependency handling across platforms.
• Fixed Python package build and CI workflow.

Full Changelog: v4.1.0...4.1.1

ViennaPS-4.1.0

New Features

• CPU triangle flux calculation
• More options in MakeTrench

Fixes

• Fixes in psPlasmaEtching and psIonModelUtil
• Correct wrapper and stubs to reflect changes in psReader

Full Changelog: 4.0.1...v4.1.0

ViennaPS-4.0.1

What's Changed

• Remove NumericType template in DomainSetup
• Update GPU model pipelines and IonBeamEtching model
• Add Materials: Au, Cr

Full Changelog: v4.0.0...4.0.1

ViennaPS-4.0.0

ViennaPS v4.0.0 — 2025-10-22

Highlights

• Complete rework of the process framework with modular flux engine design.
• Improved GPU integration across all process types.
• Unified Python bindings: one package viennaps with submodules viennaps.d2 and viennaps.d3.
• Extended material list covering the most common materials in semiconductor fabrication.

Breaking changes

• Python packages viennaps2d and viennaps3d are removed. Use viennaps.
• Default Python dimension is 2D when using top-level viennaps.*.
• Dimension can be changed at runtime with viennaps.setDimension(2 | 3).
• AtomicLayerProcess was removed. ALD and related atomic-layer processes are now handled by the standard Process() class.
• All process parameters must now be set through parameter structs using setParameters().
• saveSurfaceMesh() behavior changed (see below).

New / changed API

Flux engine

Processes now use a configurable flux engine, which defines how particle fluxes are computed.
Available options:

• AUTO (default) — chooses CPU or GPU automatically, depending on build type and model support
• CPU_DISK
• GPU_DISK
• GPU_LINE
• GPU_TRIANGLE

Example:

auto proc = ps::Process(...);
proc.setFluxEngineType(ps::FluxEngineType::AUTO);

import viennaps as vps
p = vps.Process(...)
p.setFluxEngineType(vps.FluxEngineType.AUTO)

Python bindings

• Unified structure:

  import viennaps as vps
  
  dom = vps.Domain()  # default 2D
  
  from viennaps import d3
  dom3 = d3.Domain()  # explicit 3D
  
  vps.setDimension(3)
  dom = vps.Domain()  # now 3D by default

Process parameters

• Parameters are configured via parameter structs and passed using the unified setParameters() function:

  struct AtomicLayerProcessParameters {
    unsigned numCycles = 1;
    double pulseTime = 1.0;
    double coverageTimeStep = 1.0;
    double purgePulseTime = 0.0;
  };
  
  struct CoverageParameters {
    double coverageDeltaThreshold = 0.0;
    unsigned maxIterations = std::numeric_limits<unsigned>::max();
  };

• Example:

  ps::AtomicLayerProcessParameters alp;
  alp.numCycles = 10;
  proc.setParameters(alp);  // same function for all parameter structs

• Applies to:

  • AtomicLayerProcessParameters
  • CoverageParameters
  • RayTracingParameters
  • AdvectionParameters

Domain and mesh output

• saveSurfaceMesh() updated:

  • Removed addMaterialIds option.
  • New option addInterfaces — when enabled, all material interfaces in the domain are exported.

  domain.saveSurfaceMesh("surface.vtp", /*addInterfaces=*/true);

Models and physical updates

• Fluorocarbon model now supports arbitrary material combinations.
  See documentation for the new parameter setup.
• Geometric process models: fixed an issue where underlying materials were not etched correctly.
• Material list extended to include commonly used materials in semiconductor manufacturing (e.g., Si, SiO₂, Si₃N₄, SiGe, W, Al₂O₃, HfO₂, TiN, and more).

Build system and GPU support

• OptiX headers are now downloaded automatically if not found on the system when building with GPU support.
• Standard OpenMP is used on macOS.

Other changes

• Cleaner process metadata management.
• New calculateFlux() entry point in the process path.
• Improved surface mesh generation and point-to-element data mapping.
• Extrusion and slice functions exposed in Python (Extrude, Slice).
• GDS reader fixes and mask blur improvements.

Migration guide

From viennaps2d / viennaps3d to unified viennaps

• Before:

  import viennaps2d as vps
  dom = vps.Domain(...)

• After:

  import viennaps as vps
  dom = vps.Domain(...)

Selecting a flux engine

p.setFluxEngineType(vps.FluxEngineType.AUTO)         # automatic
p.setFluxEngineType(vps.FluxEngineType.CPU_DISK)     # CPU
p.setFluxEngineType(vps.FluxEngineType.GPU_TRIANGLE) # GPU

Process parameters

• Before:

  proc.numCycles = 10;

• After:

  ps::AtomicLayerProcessParameters alp;
  alp.numCycles = 10;
  proc.setParameters(alp);

Surface mesh export

• Before:

  domain.saveSurfaceMesh("surf.vtp", /*addMaterialIds=*/true);

• After:

  domain.saveSurfaceMesh("surf.vtp", /*addInterfaces=*/true);

ViennaPS-3.7.3

This release provides a temporary compatibility update.

Updated dependency to ViennaLS 4.5.0 (instead of the latest version) to ensure compatibility and restore Python import functionality.

Notes:
This is an interim fix. A major update aligning with ViennaPS 4.0.0 and ViennaLS 5.0.0 will follow soon.

ViennaPS-3.7.2

What's Changed

• Parallelize surface rate calculation by @tobre1 in #151
• Use python native enums and improve stub generation by @tobre1 in #152
• ViennaPS title banner by @tobre1 in #153

Full Changelog: v3.7.1...v3.7.2

ViennaPS-3.7.1

What's Changed

• Photodiode example (FDTD) by @exilief in #140
• Add process meta data to ALP by @tobre1 in #149
• Add version to meta data by @tobre1 in #150

Full Changelog: v3.7.0...v3.7.1

ViennaPS-3.7.0

What's Changed

• Update TecPlotReader
• Update license
• Add shared library target
• Improved epitaxy model
• Update ViennaCore with improved Logger

Full Changelog: v3.6.1...v3.7.0

ViennaPS-3.6.1

What's Changed

• Improve TecPlotReader and custom particle sampling example
• Fix domain print in Python bindings

Full Changelog: v3.6.0...v3.6.1

ViennaPS-3.6.0

What's Changed

• Added emulation examples (FinFET, Nanosheet)
• Added coverage convergence warning (too many intermediate iterations)
• add a model of SF6C4F8 Etching
• Add optional process meta data to VTK output
• Add custom particle distribution example

Full Changelog: v3.5.1...v3.6.0